| Title: |
FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits |
| Authors: |
Capogreco, E.; Arimura, H.; Ritzenthaler, R.; Brus, S.; Oniki, Y.; Dupuy, E.; Sebaai, F.; Radisic, D.; Chan, B. T.; Zhou, D.; Machkaoutsan, V.; Yoon, S.; Itokawa, H.; Yamaguchi, M.; Gao, Z.; Fazan, P.; Chen, Y.; Subramanian, S.; Ragnarsson, L.-A.; Spessot, A.; Litta, E. Dentoni; Horiguchi, N. |
| Source: |
2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :26.2.1-26.2.4 Dec, 2022 |
| Relation: |
2022 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |