| Title: |
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells |
| Authors: |
Vega-Gonzalez, V.; Radisic, D.; Choudhury, S.; Tierno, D.; Thiam, A.; Batuk, D.; Martinez, G.T.; Seidel, F.; Decoster, S.; Kundu, S.; Tsvetanova, D.; Peter, A.; De Coster, H.; Sepulveda-Marquez, A.; Altamirano-Sanchez, E.; Chan, Bt; Drissi, Y.; Sherazi, Y.; Uk-Lee, J.; Ciofi, I.; Murdoch, G.; Nagesh, N.; Hellings, G.; Ryckaert, J.; Biesemans, S.; Litta, E. Dentoni; Horiguchi, N.; Park, S.; Tokei, Zs. |
| Source: |
2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :23.2.1-23.2.4 Dec, 2022 |
| Relation: |
2022 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |