| Title: |
Improved nanoindentation methods for polymer based multilayer film cross-sections |
| Authors: |
Christoefl, P.; Jakes, J. E.; Geier, J.; Pinter, G.; Oreski, G.; Stone, D.; Teichert, C. |
| Source: |
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2023 24th International Conference on. :1-8 Apr, 2023 |
| Relation: |
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) |
| Database: |
IEEE Xplore Digital Library |