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Spiral Compensation of Surface Error in Ultra-Precision Micro-milling of Spherical Micro Lens Array with a tilt spindle

Title: Spiral Compensation of Surface Error in Ultra-Precision Micro-milling of Spherical Micro Lens Array with a tilt spindle
Authors: Yu, Shimeng; Wang, Yifan; Yao, Peng; Li, Yueming; Xu, Jimiao; Wang, Qingwei; Chu, Dongkai; Qu, Shuoshuo; Huang, Chuanzhen
Source: 2022 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS) Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS), 2022 8th International Conference on. :1-5 Aug, 2022
Relation: 2022 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS)
Database: IEEE Xplore Digital Library