Laser-Based Technologies for Microfabrication of Key Electromagnetic Components of Miniaturized Vacuum Electron Devices
| Title: | Laser-Based Technologies for Microfabrication of Key Electromagnetic Components of Miniaturized Vacuum Electron Devices |
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| Authors: | Starodubov, Andrei; Galushka, Viktor; Ryskin, Nikita; Galkin, Alexander; Bessonov, Dmitrii; Tuzhilin, Dmitrii; Nozhkin, Dmitrii |
| Source: | 2023 24th International Vacuum Electronics Conference (IVEC) Vacuum Electronics Conference (IVEC), 2023 24th International. :1-2 Apr, 2023 |
| Relation: | 2023 24th International Vacuum Electronics Conference (IVEC) |
| Database: | IEEE Xplore Digital Library |