A Novel Method to Improve CMP Selectivity by Ultra-High-Dose Ion Implantation
| Title: | A Novel Method to Improve CMP Selectivity by Ultra-High-Dose Ion Implantation |
|---|---|
| Authors: | Yuan, S.; Omori, K.; Yamaguchi, T.; Ide, T.; Muranaka, S.; Inoue, M. |
| Source: | 2023 21st International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2023 21st International Workshop on. :1-4 Jun, 2023 |
| Relation: | 2023 21st International Workshop on Junction Technology (IWJT) |
| Database: | IEEE Xplore Digital Library |