Doping of silicon by phosphorus end-terminated polymers: shallow junction formation by thermal and laser annealing
| Title: | Doping of silicon by phosphorus end-terminated polymers: shallow junction formation by thermal and laser annealing |
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| Authors: | Perego, Michele; Barin, Gianluca; Chiarcos, Riccardo; Laus, Michele; Napolitani, Enrico |
| Source: | 2023 21st International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2023 21st International Workshop on. :1-2 Jun, 2023 |
| Relation: | 2023 21st International Workshop on Junction Technology (IWJT) |
| Database: | IEEE Xplore Digital Library |