Phosphorus Deactivation and Electron Mobility Enhancement in Ultrathin Silicon Nanosheets
| Title: | Phosphorus Deactivation and Electron Mobility Enhancement in Ultrathin Silicon Nanosheets |
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| Authors: | Perego, M.; Pulici, A.; Kuschlan, S.; Seguini, G.; Taglietti, F.; Fanciulli, M.; Chiarcos, R.; Laus, M. |
| Source: | 2023 Silicon Nanoelectronics Workshop (SNW) Silicon Nanoelectronics Workshop (SNW), 2023. :77-78 Jun, 2023 |
| Relation: | 2023 Silicon Nanoelectronics Workshop (SNW) |
| Database: | IEEE Xplore Digital Library |