| Title: |
Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions |
| Authors: |
Franco, J.; Arimura, H.; de Marneffe, J.-F.; Brus, S.; Ritzenthaler, R.; Litta, E. Dentoni; Croes, K.; Kaczer, B.; Horiguchi, N. |
| Source: |
2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2023 IEEE Symposium on. :1-2 Jun, 2023 |
| Relation: |
2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) |
| Database: |
IEEE Xplore Digital Library |