| Title: |
Novel IR Laser Cleaving for ultra-thin Layer Transfer and 3D Stacked Devices |
| Authors: |
Uhrmann, Thomas; Urban, Peter; Povazay, Boris; Gruber, Michael J.; Bavin, Julian; Burgstaller, Daniel; Wimplinger, Markus; Thallner, Bernd |
| Source: |
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2023 IEEE 73rd. :1749-1753 May, 2023 |
| Relation: |
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |