| Title: |
Lithographic Performance and Insulation Reliability of a Novel i-Line Photosensitive Dielectric Material |
| Authors: |
Inoue, Go; Yukimori, Daiki; Shibasaki, Kaho; Okuda, Ayano; Ishikawa, Nobuhiro; Han, Young-Gun; Kanayama, Taka; Suetsugu, Tadashi; Ogata, Toshiyuki |
| Source: |
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2023 IEEE 73rd. :44-48 May, 2023 |
| Relation: |
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |