Fabrication and characterization of Al-based integrated MIS capacitors
| Title: | Fabrication and characterization of Al-based integrated MIS capacitors |
|---|---|
| Authors: | Rocha-Aguilera, Daniel; Ferrusca-Rodriguez, Daniel; Molina-Reyes, Joel |
| Source: | 2023 IEEE Latin American Electron Devices Conference (LAEDC) Electron Devices Conference (LAEDC), 2023 IEEE Latin American. :1-4 Jul, 2023 |
| Relation: | 2023 IEEE Latin American Electron Devices Conference (LAEDC) |
| Database: | IEEE Xplore Digital Library |