6.9 GHz Film Bulk Acoustic Resonator based on Pulsed Laser Deposited LiNbO3 Film
| Title: | 6.9 GHz Film Bulk Acoustic Resonator based on Pulsed Laser Deposited LiNbO3 Film |
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| Authors: | Sauze, L.C.; Vaxelaire, N.; Templier, R.; Pierre, F.; Maeder-Pachurka, C.; Delprato, J.; Remiens, D.; Rodriguez, G.; Bousquet, M.; Dupont, F. |
| Source: | 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023 |
| Relation: | 2023 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |