| Title: |
Exploring manufacturability of novel 2D channel materials: 300 mm wafer-scale 2D NMOS & PMOS using MoS2, WS2, & WSe2 |
| Authors: |
Dorow, C. J.; Schram, T.; Smets, Q.; O'Brien, K. P.; Maxey, K.; Lin, C.-C.; Panarella, L.; Kaczer, B.; Arefin, N.; Roy, A.; Jordan, R.; Oni, A.; Penumatcha, A.; Naylor, C. H.; Kavrik, M.; Cott, D.; Graven, B.; Afanasiev, V.; Morin, P.; Asselberghs, I.; Lockhart de La Rosa, C. J.; Sankar Kar, G.; Metz, M.; Avci, U. |
| Source: |
2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023 |
| Relation: |
2023 International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |