| Title: |
Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function |
| Authors: |
Sasaki, Takashi; Piot, Adrien; Fleury, Clement; Guerreiro, Sara; Rocha, Rodrigo T.; Lagosh, Anton |
| Source: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1015-1018 Jan, 2024 |
| Relation: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |