| Title: |
Fabrication and Characterization of Large-Area Flexible Capacitive Micromachined Ultrasound Transducers |
| Authors: |
Halbach, Chloe; Segers, Jeremy; Rochus, Veronique; Georgitzikis, Epimitheas; Heremans, Paul; Cheyns, David |
| Source: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :943-946 Jan, 2024 |
| Relation: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |