Atomic Layer Deposition of Al-Doped ZnO Contacts for ZnO Thin-Film Transistors
| Title: | Atomic Layer Deposition of Al-Doped ZnO Contacts for ZnO Thin-Film Transistors |
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| Authors: | Rowlinson, B.D.; Zeng, J.; Akrofi, J.D.; Patzig, C.; Ebert, M.; Chong, H.M.H. |
| Source: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 45(5):837-840 May, 2024 |
| Database: | IEEE Xplore Digital Library |