Electrical behavior of ALD-molybdenum films in the thin-film limit
| Title: | Electrical behavior of ALD-molybdenum films in the thin-film limit |
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| Authors: | van der Zouw, Kees; Dulfer, Simone D.; Aarnink, Antonius A.I.; Kovalgin, Alexey Y. |
| Source: | 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2024 IEEE 36th International Conference on. :1-6 Apr, 2024 |
| Relation: | 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) |
| Database: | IEEE Xplore Digital Library |