| Title: |
Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI |
| Authors: |
Rinaudo, Pietro; Chasin, Adrian; Zhao, Ying; Kaczer, Ben; Rassoul, Nouredine; Dekkers, Harold F.W.; van Setten, Michiel J.; Belmonte, Attilio; De Wolf, Ingrid; Kar, Gouri; Franco, Jacopo |
| Source: |
2024 IEEE International Reliability Physics Symposium (IRPS) International Reliability Physics Symposium (IRPS), 2024 IEEE. :1-6 Apr, 2024 |
| Relation: |
2024 IEEE International Reliability Physics Symposium (IRPS) |
| Database: |
IEEE Xplore Digital Library |