Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS
| Title: | Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS |
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| Authors: | Merrien, T.; Didier, P.; Algre, E. |
| Source: | IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control IEEE Open J. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Open Journal of. 4:63-76 2024 |
| Database: | IEEE Xplore Digital Library |