| Title: |
IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding Mechanism |
| Authors: |
Chancerel, Francois; Urban, Peter; Slabbekoorn, John; Halas, Simon; Bravin, Julian; Brems, Steven; Uhrmann, Thomas; Wimplinger, Markus; Phommahaxay, Alain; Beyne, Eric |
| Source: |
2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :343-347 May, 2024 |
| Relation: |
2024 IEEE 74th Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |