Multiphysics Overlay Modelling of Monolithic 3D Fusion and Hybrid Bonding Processes
| Title: | Multiphysics Overlay Modelling of Monolithic 3D Fusion and Hybrid Bonding Processes |
|---|---|
| Authors: | Muhlstatter, Christian; Koller, Lukas; Plach, Thomas; Dragoi, Viorel; Wimplinger, Markus |
| Source: | 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :1548-1551 May, 2024 |
| Relation: | 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) |
| Database: | IEEE Xplore Digital Library |