| Title: |
Investigation on the use of Al-Ge eutectic bonding in the structure part of a multilayer stacked MEMS device |
| Authors: |
Wang, Jun; Mannarino, Manuel; Visker, Jakob; Kang, Shuo; Weidlinger, Gunther; Wernicke, Tobias; Burggraf, Jurgen; Wimplinger, Markus; Majeed, Bivragh; Peng, Lan; Karve, Gauri; Haspeslagh, Luc |
| Source: |
2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :2008-2012 May, 2024 |
| Relation: |
2024 IEEE 74th Electronic Components and Technology Conference (ECTC) |
| Database: |
IEEE Xplore Digital Library |