| Title: |
Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology |
| Authors: |
Shao, Yunzhe; Jenkins, Nicholas W.; Klein, Clay; Li, Yunhao; Esashi, Yuka; Murnane, Margaret M.; Kapteyn, Henry C.; Tanksalvala, Michael |
| Source: |
2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA) Computational Imaging Using Synthetic Apertures (CISA), 2024 IEEE Conference on. :1-5 May, 2024 |
| Relation: |
2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA) |
| Database: |
IEEE Xplore Digital Library |