Intermediate-Pressure O2 RFCCP:Different Power and pressure
| Title: | Intermediate-Pressure O2 RFCCP:Different Power and pressure |
|---|---|
| Authors: | Zhang, S.; Curley, G.; Booth, J.-P. |
| Source: | 2024 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2024 IEEE International Conference on. :1-1 Jun, 2024 |
| Relation: | 2024 IEEE International Conference on Plasma Science (ICOPS) |
| Database: | IEEE Xplore Digital Library |