Drift-Diffusion models for RF-CCPs at intermediate pressure: estimating transport coefficients
| Title: | Drift-Diffusion models for RF-CCPs at intermediate pressure: estimating transport coefficients |
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| Authors: | Zhang, S.; Laguna, A. Alvarez; Booth, J.-P. |
| Source: | 2024 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2024 IEEE International Conference on. :1-1 Jun, 2024 |
| Relation: | 2024 IEEE International Conference on Plasma Science (ICOPS) |
| Database: | IEEE Xplore Digital Library |