Extremely Thin Proximity Platinum Silicide Formation Process Using Continuous-Wave Laser Scanning Anneal
| Title: | Extremely Thin Proximity Platinum Silicide Formation Process Using Continuous-Wave Laser Scanning Anneal |
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| Authors: | Kim, S.; Gyu Kwon, M.; Kim, M.; Bin Lee, C.; Sung Kim, K.; Jun Hwang, H.; Kim, J.; Hun Lee, B. |
| Source: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 45(10):1941-1944 Oct, 2024 |
| Database: | IEEE Xplore Digital Library |