Suppression of Threshold Voltage Variation by H₂ Plasma Improved KrF Photoresist Profile
| Title: | Suppression of Threshold Voltage Variation by H₂ Plasma Improved KrF Photoresist Profile |
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| Authors: | Liang, C.; Bi, R.; Liu, H.; He, S.; Li, H.; Jiang, Y. |
| Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 71(9):5624-5629 Sep, 2024 |
| Database: | IEEE Xplore Digital Library |