| Title: |
TOF-SIMS Analytical Method for Gate Oxide Breakdown Voltage Shift Failure |
| Authors: |
Zhu, Lei; Teo, Lingling; Zhao, Yanfei; Leong, Henry; Long, Penny; Hua, Younan; Li, Xiaomin; Zhou, Hao; Chen, Qian |
| Source: |
2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) the Physical and Failure Analysis of Integrated Circuits (IPFA), 2024 IEEE International Symposium on. :1-4 Jul, 2024 |
| Relation: |
2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) |
| Database: |
IEEE Xplore Digital Library |