| Title: |
Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration |
| Authors: |
Wu, Chen; Decoster, Stefan; Renaud, Vincent; Hermans, Yannick; Marien, Philippe; Marti, Giulio; Heylen, Nancy; Kenens, Bart; Roy, Syamashree; Okudur, Fulya Ulu; Le, Quoc Toan; Reddy, Naveen; Marquez, Alfonso Sepulveda; Delie, Gilles; Gupta, Anshul; Lesniewska, Alicja; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt |
| Source: |
2024 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2024 IEEE International. :1-3 Jun, 2024 |
| Relation: |
2024 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |