| Title: |
Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET |
| Authors: |
Vega-Gonzalez, V.; Stiers, K.; Sheng, C.; Demuynck, S.; de Carvalho Cavalcante, C Toledo; Petersen, L.; Chiarella, T.; Boemmels, J.; Sarkar, T.; Vergel, N. Franchina; Radisic, D.; Loo, R.; Rosseel, E.; Porret, C.; Mannaert, G.; Choudhury, S.; Brissonneau, V.; Dupuy, E.; Peter, A.; Jourdan, N.; Soulie, J-P.; Hakamata, T.; Romo-Negreira, A.; Clark, R.; Vandersmissen, K.; Sebaai, F.; Gowda, P. Puttarame; Lai, J.G.; Mingardi, A.; Sarkar, S. Kumar; Chan, B. T.; Marquez, A. Sepulveda; Langer, R.; Koo, I. Gyo; Sanchez, E. Altamirano; Devriendt, K.; Delgadillo, P. Rincon; Lazzarino, F.; Mitard, J.; Geypen, J.; Batuk, D.; Chen, Y-F.; Verbeeck, F.; Holsteyns, F.; Subramanian, S.; Tokei, Zs.; Horiguchi, N.; Biesemans, S. |
| Source: |
2024 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2024 IEEE International. :1-3 Jun, 2024 |
| Relation: |
2024 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |