| Title: |
Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias |
| Authors: |
Delie, Gilles; Murdoch, Gayle; Marti, Giulio; Gupta, Anshul; Wu, Chen; Lesniewska, Alicja; Gavrilov, Anton; Ciofi, Ivan; Kundu, Souvik; Decoster, Stefan; Park, Seongho; Tokei, Zsolt |
| Source: |
2024 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2024 IEEE International. :1-3 Jun, 2024 |
| Relation: |
2024 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |