Expert Knowledge-based Segmentation Algorithm for IC Layout SEM Images
| Title: | Expert Knowledge-based Segmentation Algorithm for IC Layout SEM Images |
|---|---|
| Authors: | Lippmann, Bernhard; Mutter, Johannes; Sigl, Georg |
| Source: | 2024 IEEE Physical Assurance and Inspection of Electronics (PAINE) Physical Assurance and Inspection of Electronics (PAINE), 2024 IEEE. :1-7 Nov, 2024 |
| Relation: | 2024 IEEE Physical Assurance and Inspection of Electronics (PAINE) |
| Database: | IEEE Xplore Digital Library |