| Title: |
Residual Stress Analysis in ScAlN Micro-Diaphragm for High Sensitivity and Wide Range Pressure Sensing |
| Authors: |
Liu, Jihang; Chen, Daniel Ssu-Han; Jian, Goh Duan; Wai, David Choong Sze; Srinivas, Merugu; Huamao, Lin; Xin, Zhang Qing; Kee, Peter Chang Hyun; Giusti, Domenico; Leotti, Alberto; D'Ercoli, Filippo; Lazzari, Carla; Tacchini, Riccardo; Koh, Yul |
| Source: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024 |
| Relation: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) |
| Database: |
IEEE Xplore Digital Library |