| Title: |
Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects |
| Authors: |
Liu, Jihang; Jian, Goh Duan; Ssu-Han Chen, Daniel; Sze Wai, David Choong; Shyam, Trivedi; Ramegowda, Prakasha Chigahalli; Srinivas, Merugu; Huamao, Lin; Xin, Zhang Qing; Chang Hyun Kee, Peter; Das, Amal; Sciarrone, Alessandra; Leotti, Alberto; Giusti, Domenico; Lee, Joshua E.-Y.; Koh, Yul |
| Source: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024 |
| Relation: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) |
| Database: |
IEEE Xplore Digital Library |