| Title: |
Tantalum Thin Films Sputtered on Silicon and on Different Seed Layers: Material Characterization and Coplanar Waveguide Resonator Performance |
| Authors: |
Singer, Moritz; Schoof, Benedikt; Gupta, Harsh; Zahn, Daniela; Weber, Johannes; Tornow, Marc |
| Source: |
2024 IEEE International Conference on Quantum Computing and Engineering (QCE) QCE Quantum Computing and Engineering (QCE), 2024 IEEE International Conference on. 01:1197-1202 Sep, 2024 |
| Relation: |
2024 IEEE International Conference on Quantum Computing and Engineering (QCE) |
| Database: |
IEEE Xplore Digital Library |