Ultra-High Density Deep Trench Capacitor (DTC) for 3DIC Integration
| Title: | Ultra-High Density Deep Trench Capacitor (DTC) for 3DIC Integration |
|---|---|
| Authors: | Cheng, H.L.; Lin, J.Y.; Hsu, T.C.; Su, Eva; Wu, S.M.; Chang, Y.C.; Chien, T.H.; Peng, C.Y.; Yang, J.H.; Tsui, Felix; Huang, S.F. |
| Source: | 2024 International 3D Systems Integration Conference (3DIC) 3D Systems Integration Conference (3DIC), 2024 International. :1-3 Sep, 2024 |
| Relation: | 2024 International 3D Systems Integration Conference (3DIC) |
| Database: | IEEE Xplore Digital Library |