Monolithic Fabrication of Micron-Scale Piezo-Polymer Transducers on CMOS
| Title: | Monolithic Fabrication of Micron-Scale Piezo-Polymer Transducers on CMOS |
|---|---|
| Authors: | Arslan, Volkan; Jadwiszczak, Jakub; Sherman, Jeffrey; Uguz, Ilke; Shepard, Kenneth L. |
| Source: | 2024 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2024 IEEE International. :1-4 Dec, 2024 |
| Relation: | 2024 IEEE International Electron Devices Meeting (IEDM) |
| Database: | IEEE Xplore Digital Library |