| Title: |
Advanced Metal-Assisted Chemical Etching Using HF Vapor and Ozone for MEMS Process |
| Authors: |
Cho, Hyein; Ahn, Yebin; Hong, Sang Beom; Park, Soohyeok; Han, Yejin; Kim, Geonhwi; Song, Eunjeong; Choi, Ye Ji; Jang, So Eun; Youn, Duck Hyun; Shin, Hyeyoung; Um, Han-Don |
| Source: |
2024 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2024 IEEE International. :1-4 Dec, 2024 |
| Relation: |
2024 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |