| Title: |
Monolithic-CFET with Direct Backside Contact to Source/Drain and Backside Dielectric Isolation |
| Authors: |
Vandooren, A.; Stiers, K.; Sheng, C.; de Carvalho Cavalcante, C. Toledo; Hosseini, M.; Batuk, D.; Peng, A.; Zhou, X.; Mertens, H.; Veloso, A.; Mingardi, A.; Kumar, S. Sarkar; Saroj, R. Kumar; D'have, K.; Chiarella, T.; Bommels, J.; Loo, R.; Rosseel, E.; Porret, C.; Shimura, Y.; Akula, A.; Choudhury, S.; Brissonneau, V.; Dupuy, E.; Sarkar, T.; Peter, A.; Jourdan, N.; Soulie, J.P.; Vandersmissen, K.; Iacovo, S.; Montero, D.; Vrancken, E.; Sebaai, F.; Gowda, P. Puttarame; Lai, K.; Buccheri, N.; Matagne, P.; Chan, B. T.; Marquez, A. Sepulveda; Langer, R.; Koo, I. Gyo; Sanchez, E. Altamirano; Devriendt, K.; Lazzarino, F.; Mitard, J.; Geypen, J.; Grieten, E.; Chen, Y-F.; Verbeek, F.; Pollenus, H.; Heijlen, J.; Lima, L.P.B.; Holsteyns, F.; Subramanian, S.; Horiguchi, N.; Demuynck, S.; Biesemans, S. |
| Source: |
2024 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2024 IEEE International. :1-4 Dec, 2024 |
| Relation: |
2024 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |