| Title: |
NbTiN Based Two-Metal Level Semi-Damascene Interconnects, Josephson Junctions and Capacitors for Superconducting Digital Logic |
| Authors: |
Pokhrel, Ankit; Lozano, Daniel Perez; Soulie, Jean-Philippe; Vangoidsenhoven, Diziana; Sarkar, Sujan K.; Saroj, Rajendra K.; Canvel, Yann; Renaud, Vincent; Kenens, Bart; Walke, Amey M.; Bizindavyi, Jasper; Iraci, Sara; Ibrahim, Seifallah; Hodges, Blake; Josephsen, Trent; Perumkunnil, Manu; Huet, Benjamin; O'Neal, Sabine; Herr, Quentin; Tokei, Zsolt; Herr, Anna |
| Source: |
2024 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2024 IEEE International. :1-4 Dec, 2024 |
| Relation: |
2024 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |