| Title: |
Dual-Electrode SC0.3AL0.7N pMUT with Ultra-High Output Pressure for Long Distance Ranging |
| Authors: |
Liu, Jihang; Wai Choong, David Sze; Shun Teo, Yong; Hong, Yan; Chen, Daniel Ssu-Han; Ghosh, Sagnik; Pea, Siow Pey; Chin Chan, Huan; Liu, Peng; Li, Minghua; Lin, Huamao; Zhang, Qing Xin; Hyun Kee Chang, Peter; Srinivas, Merugu; Giusti, Domenico; Leotti, Alberto; Koh, Yul; Zhu, Yao |
| Source: |
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :107-110 Jan, 2025 |
| Relation: |
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |