The Impact of Process Steps on Nearly Ideal Subthreshold Slope in 300-mm Compatible InGaZnO TFTs
| Title: | The Impact of Process Steps on Nearly Ideal Subthreshold Slope in 300-mm Compatible InGaZnO TFTs |
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| Authors: | Tang, H.; Lin, D.; Subhechha, S.; Chasin, A.; Matsubayashi, D.; van Setten, M.; Wan, Y.; Dekkers, H.; Li, J.; Subramanian, S.; Chen, Z.; Rassoul, N.; Jiang, Y.; Van Houdt, J.; Afanas'Ev, V.; Sankar Kar, G.; Belmonte, A. |
| Source: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 46(5):761-764 May, 2025 |
| Database: | IEEE Xplore Digital Library |