| Title: |
The incoming clean of raw silicon wafers: challenges, root causes and possible solutions |
| Authors: |
Willnauer, Christa; Konopatzky, Lorenz; Landgraf, Andrea; Buttner, Daniel; Soella, Frank; Assmann, Heiko; Gohler, Jens; Peters, Stefan; Vater, Alfred; Arnold, Frank; Hummeltenberg, Anja |
| Source: |
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2025 36th Annual. :1-4 May, 2025 |
| Relation: |
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |