| Title: |
Device Optimization to Enable Ultra Low Leakage Logic FinFETs |
| Authors: |
Yarmoghaddam, Elahe; Saudari, Sangameshwar Rao; Ma, Wei; Luque, Maria Toledano; Rossi, Vitor Vulcano; Osaheni, Allen; Johnson, Jeffrey B.; Kwon, O Sung; Maciejewski, Edward; Wang, Haiting; Parihar, Sanjay |
| Source: |
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2025 36th Annual. :1-4 May, 2025 |
| Relation: |
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |