Study of As-Deposited and Annealed Atomic Layer Deposited Hafnium Silicate Films
| Title: | Study of As-Deposited and Annealed Atomic Layer Deposited Hafnium Silicate Films |
|---|---|
| Authors: | Rajachidambaram, Meena; Choi, Harry; Korevaar, Bas; Sim, Hyunjun; Clements, Justin |
| Source: | 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2025 36th Annual. :1-5 May, 2025 |
| Relation: | 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: | IEEE Xplore Digital Library |