Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage
| Title: | Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage |
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| Authors: | van Haren, M.; Blanken, L.; Classens, K.; Oomen, T. |
| Source: | IEEE Transactions on Control Systems Technology IEEE Trans. Contr. Syst. Technol. Control Systems Technology, IEEE Transactions on. 33(6):2052-2063 Nov, 2025 |
| Database: | IEEE Xplore Digital Library |