Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis
| Title: | Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis |
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| Authors: | Podder, I.; Miller, M.; Fischl, T.; Bub, U. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 38(3):693-708 Aug, 2025 |
| Database: | IEEE Xplore Digital Library |