Advancements in LPCVD SiN Waveguides: Achieving 3 dB/m Propagation Loss on 200 mm Wafers
| Title: | Advancements in LPCVD SiN Waveguides: Achieving 3 dB/m Propagation Loss on 200 mm Wafers |
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| Authors: | Ozdemir, Onur; Kongnyuy, Tangla D.; Pham, Nga P.; Jansen, Roelof; Prost, Mathias; Brouckaert, Joost; Helin, Philippe |
| Source: | 2025 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2025. :1-3 Mar, 2025 |
| Relation: | 2025 Optical Fiber Communications Conference and Exhibition (OFC) |
| Database: | IEEE Xplore Digital Library |