Performance Enhancement of Piezoelectric MEMS Microspeaker Using Jointed and Separated Curved Cantilever Array With Modulation Circuits
| Title: | Performance Enhancement of Piezoelectric MEMS Microspeaker Using Jointed and Separated Curved Cantilever Array With Modulation Circuits |
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| Authors: | Lin, C.; Tseng, C.; Tsai, T.; Chen, P.; Lai, M.; Fang, W. |
| Source: | IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 26(7):9422-9430 Apr, 2026 |
| Database: | IEEE Xplore Digital Library |